subject: Shenyang Institute of Automation successfully developed nano-micro manipulator [print this page] Shenyang Institute of Automation successfully developed nano-micro manipulator
Recently, one can operate on the nanometer scale prototype of a robot system developed by the CAS Shenyang Institute of Automation success, and adopted by the State "863" theme of intelligent robot automation acceptance of the organization.
Nanotechnology is technology driven 21st century technology, the emergence and development of human society is to bring a new industrial revolution. Who can say mastered nanotechnology, whoever occupied the commanding heights of technological development in the 21st century, so the developed countries are a large number of inputs, conduct nanotechnology research.
A nanometer (1nm) is 10-9 meters, about equal to 10 argon atoms tied into the length of a straight line. In the nano-scale operations, often called the nano-micro-operation is an important part of nanotechnology, which aims at nanometer scale by the will of people to achieve mobility on nano-materials, plastic, characterization, and assembly work. Nanoparticles operation began in the 80's, the invention of electron microscopy, have allowed scientists to explore the mysteries of atomic world to carry out micromanipulation study. In 1989, IBM scientists used scanning tunneling microscopy (STM), operating 35 xenon atoms to spell IBM in the nickel metal surface three letters, has become an influential world press, opened the first of its kind nano-micro operations. Atomic force microscope (AFM) is a scanning probe microscope (SPM), Shenyang Institute of Automation micromanipulator system developed, is to AFM and robot control were combined to realize the operation of nano materials.
In the project acceptance process, the research group made the robot micro-operation and demonstration: in a silicon chip, the operator controlled the robot in 1 2 m area on a clear carve "SIA" Three letters; other A demonstration showed a 5 5 m silicon chip, the operator will be a 4 m long, 100nm thick carbon nanotubes precise moment to move to a trench where good. Throughout the operation, the operator can feel the pushing force in the process of nano-objects, nano-objects that pushed the move.
The robot system in the nano-scale system modeling, three Wiener and perception and the concept of power for error analysis and compensation, a number of breakthroughs and innovation, and reach the world advanced level. In the project study, researchers realized the SPM nano-scanning movement mechanism and robot Monitor System integration technology; created nanoscale objects under the kinematic and dynamic analysis and model of the force probe three-dimensional deformation analysis and decoupling method; achieved Sensor Real-time acquisition and processing information, force / visual feedback and control of human-computer interaction, artificial / natural symbol position feedback control method and a series of key technologies to allow the robot control nanometer precision. Tests show that depicts operation, the 512 pixel area, repeat the positioning error of less than 5 pixels, more than 1% accuracy; mobile carbon nanotubes in operation, the repeat positioning accuracy is 30nm; and location-based road sign test , its positioning error is less than 4 nm.
According to reports, the robot can be observed in nano-scale, controllable operation ability can be widely used in nano-materials, power, electrical, chemical characteristics of scientific experiments, bio-engineering and medical research, teaching and other areas of micro-nano research in the IC industry, nano-assembly and processing device is a good prospect.
