Quartz Wafer Carrier, Quartzware - Why The Are Useful In The Semiconductor Industry

Quartzware is a type of artificially fabricated crystal that is popular in the semiconductor industry

. A lot of manufacturer prefer this transparent ware because it processes properties ideal for wet process.

Some of these properties are the following:

Impermeability - quartz materials are popular for their essential impermeability to most gasses. They are capable of blocking out harmful gasses except for hydrogen, helium, and neon.

Reactivity - quartz materials are also preferred for they do not react with other substances. Such property is perfect for a material used for process environments that need a great deal of precision and demand. Some examples of elements that do not react with quartz at realistic temperatures are chlorine, bromines, and most acids and metals.

Flexibility - quartz materials have properties that allow them to be shaped into precise and complex shapes. There are many environments that quartzware are being used, ranging from high-temperature to high-vacuum environments; from high temperature to low temperature environments.

Insulating property - electrical insulating properties of quartz are superior; electrical insulation and microwave transmission properties are retained at very high temperatures and over a wide range of frequencies.

Mechanical Properties - the material is extremely strong in compression; compressive strength of better that 1.1x10 9 Pa (160,000 psi).

Why quartzware is useful in wet process?

provides no wafer pinching, chipping, micro cracking, scratching, warping or breaking

provides no wafer rattling during the boat movement

provides an improved process uniformity

provides no crystal slip lines; and no bonded wafer separation problems

can reduce particle generation

has a longer life span - 5 or more times longer than conventional boats.

Some other quartz products available in the market today:

Quartz Chamber - chambers and plasma tubes are used for containing plasmas that can reach extremely high temperatures but require high purity and visual verification.

Quartz Aspirator - an aspirator, also known as a filter pump, is a device that produces a vacuum by means of the Venturi effect.

Quartz Drain - drains are typically placed on the side or bottom of a quartz tank and are used for simply evacuating the tank or to recirculate chemistry.

Other quartzware - Quartz Baffle, Combustion Chamber, Quartz Tray, Chamber, Quartz Condenser, Quartz Distiller, Thermocouple Sheaths, Graduated Centrifuge Tube, Quartz Disc, Funnel

by: Solisa Maestri

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